PRODUCTS

VRG1000A RF Generator

Supercharge your plasma system performance with the Oregon Physics VRG1000A RF Generator, a unique 1 KW power supply with low noise, high stability, and long lifetime. The VRG delivers flexible signal generation and improved performance for plasma deposition and etch systems, among other research tools that utilize variable frequency power supplies. It is also well suited for research instruments that require a flexible power supply.

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Designed for plasma excitation, the VRG1000A is proven to tolerate the unique impedance loads of plasma sources during on/off cycles, particularly the high standing wave voltages. It operates with variable frequency that can be continuously tuned across two common fixed bands. Its frequency range covers both the 27.12 and 40.68 MHz ISM frequency bands commonly used in science, industry and research. Users requiring both bands at different times can use this single solution, rather than two different power supplies with each operating at one of the bands. Furthermore, the VRG1000A allows fine frequency adjustment over the full 25-42 MHz range.

VRG1000A RF Generator Features and Specifications:

Adjustable RF Output of 25-42 MHz frequency
Adjustments can be made both remotely using software and physically using front panel knobs
1000 W maximum output power into 50 Ohms
Handles resonant (tuned antenna) loads
Reflected power (VSWR) protected (power output automatically drops)
Power stability ±(1% + 1W) over 10 hour period
0.01% frequency stability over 10 hour period
Absorbed (“Real”) power regulation mode compensates for match circuit tuning drift
Auto frequency tuning is available on units running newer software versions
Units can be upgraded to the latest software in the field by the user
Color LCD display with clear displays of status, options, etc.
Fault/normal operation indicator on front panel
Nonvolatile memory retains power and frequency settings through power cycles
Over-temperature protected
Liquid cooling and low noise variable speed fans ensure quiet operation

Contact us to learn how the VRG RF Generator can be integrated with your current instrument setup or to discuss your specific research application.